Gases and operation modes for plasma cleaning?

View previous topic View next topic Go down

Gases and operation modes for plasma cleaning?

Post  vini on Sun May 24, 2009 5:31 pm

Hi,

Can you tell me which gas is to be used in the plasma cleaning chamber - Argon, oxygen or nitrogen? Oxygen is a reactive (chemical) cleaning while Argon is a physical one. Also, what modes (primary or secondary; RF, DC etc. ) shall i use for the same?
Do I also need to worry about whether the array is Pt, gold or ITO and change gases or modes accordingly?

Regards,

Vini.

vini

Posts : 7
Join date : 2009-04-13
Location : India

View user profile

Back to top Go down

Re: Gases and operation modes for plasma cleaning?

Post  Frank MCS on Mon May 25, 2009 6:19 am

Hi Vini,
we use just normal air for plasma cleaning. I don't know about the other settings, though, as our cleaner does not have them. Best contact the company who sold you the plasma device.

Cheers Frank
avatar
Frank MCS

Posts : 184
Join date : 2008-07-14

View user profile

Back to top Go down

View previous topic View next topic Back to top


 
Permissions in this forum:
You cannot reply to topics in this forum