Gases and operation modes for plasma cleaning?

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Gases and operation modes for plasma cleaning? Empty Gases and operation modes for plasma cleaning?

Post  vini on Sun May 24, 2009 5:31 pm

Hi,

Can you tell me which gas is to be used in the plasma cleaning chamber - Argon, oxygen or nitrogen? Oxygen is a reactive (chemical) cleaning while Argon is a physical one. Also, what modes (primary or secondary; RF, DC etc. ) shall i use for the same?
Do I also need to worry about whether the array is Pt, gold or ITO and change gases or modes accordingly?

Regards,

Vini.

vini

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Gases and operation modes for plasma cleaning? Empty Re: Gases and operation modes for plasma cleaning?

Post  Frank MCS on Mon May 25, 2009 6:19 am

Hi Vini,
we use just normal air for plasma cleaning. I don't know about the other settings, though, as our cleaner does not have them. Best contact the company who sold you the plasma device.

Cheers Frank
Frank MCS
Frank MCS

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