Gases and operation modes for plasma cleaning?

Hi,

Can you tell me which gas is to be used in the plasma cleaning chamber - Argon, oxygen or nitrogen? Oxygen is a reactive (chemical) cleaning while Argon is a physical one. Also, what modes (primary or secondary; RF, DC etc. ) shall i use for the same?
Do I also need to worry about whether the array is Pt, gold or ITO and change gases or modes accordingly?

Regards,

Vini.

Hi Vini,
we use just normal air for plasma cleaning. I don't know about the other settings, though, as our cleaner does not have them. Best contact the company who sold you the plasma device.

Cheers Frank